18-5, 19-1 pull back, 2in1 systemMask-inspection tool(6", 1port), Normal Port (8")2ports(6", 8")Stage unlocked, ETU robot & controller(Brooks), EDX option(No PC)Covers, FFU,(Missing : OCTAN PC, HDD, Anorad PC, Ion Pump Cont, VACR, Image Processor PC)(Fail : WHC PC?, Turbo Pump?)(Cannot check : CDM, Chuck Cont)